■論文
| 論文名：Fabrication of Microprobes on A Ultrathick Glass Substrate with Narrow-Pitch Electrical Feedthroughs for Next-Generation LSI Burn-In Tests |  論文(PDF) |
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掲載誌名：Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems 発表日：2008.1 発表者：東北大学，メムス・コア |
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