Thesis
| Fabrication of Microprobes on A Ultrathick Glass Substrate with Narrow-Pitch Electrical Feedthroughs for Next-Generation LSI Burn-In Tests |  THESIS(PDF) |
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Publishing : Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems Date : 2008.1 Author : TOHOKU Univ., MEMS-CORE |
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